Its current function serves as a sensitive picoammeter, directly measuring DC currents to 1fA. The built-in ±20V voltage source with DC, staircase, and squarewave waveforms permits both current and quasistatic capacitance measurements to be made either at a single device bias or as a function of voltage. This measurement flexibility makes the 595 appropriate for characterization of many semiconductor materials and components.
Quasistatic C-V measurements in the Model 595 are made using the “feedback charge” technique. Use of this technique makes it easy to measure quasistatic C-V characteristics of devices that would be unsuitable for testing with the traditional ramp method and static or Q-V methods.
Feedback charge brings to the Model 595:
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The ability to detect and correct for device or fixture leakage currents
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Rapid and quantitative indication of device equilibrium
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Superior signal-to-noise performance—even with the slow voltage sweeps required by today’s state-ofthe-art devices
