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Keithley 595 Quasistatic C-V Meter

Quasistatic C-V Meter

Product Status: New / Refurbished
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SPECIFICATIONS

The Keithley Model 595 Quasistatic C-V Meter measures quasistatic capacitance versus voltage (C-V) characteristics of Metal Insulator Semiconductor (MIS) semiconductor devices. The C-V measurement technique used by the 595 provides diagnostics and correction for common sources of errors to increase confidence in test results.

Its current function serves as a sensitive picoammeter, directly measuring DC currents to 1fA. The built-in ±20V voltage source with DC, staircase, and squarewave waveforms permits both current and quasistatic capacitance measurements to be made either at a single device bias or as a function of voltage. This measurement flexibility makes the 595 appropriate for characterization of many semiconductor materials and components.

Quasistatic C-V measurements in the Model 595 are made using the “feedback charge” technique. Use of this technique makes it easy to measure quasistatic C-V characteristics of devices that would be unsuitable for testing with the traditional ramp method and static or Q-V methods.

Feedback charge brings to the Model 595:
  • The ability to detect and correct for device or fixture leakage currents
  • Rapid and quantitative indication of device equilibrium
  • Superior signal-to-noise performance—even with the slow voltage sweeps required by today’s state-ofthe-art devices
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