- High-resolution/accuracy and wide range. I: 1 fA to 1 A (20 fA offset accuracy), V: 1 µV to 200 V
- Fully-automated I-V sweep measurements with dc or pulse mode, expandable up to 6 SMUs
- Synchronized stress/measure function, two high-voltage pulse generator units (±40 V)
- Time-domain measurement: 60 µs-variable intervals, up to 10,001 points
- Easy to use: knob-sweep similar to curve tracer, automatic analysis functions
- Automation: built-in HP Instrument BASIC, trigger I/O capability
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